TUP30 　ポスター①　 8月29日 14号館1441教室 13:30-15:30

超低光刺激脱離、低い抵抗率かつ高い耐久性のPd膜の開発

Durable Pd films with ultra-low photon stimulated desorption and low resistivity

○金 秀光，谷本 育律，内山 隆司，本田 融（高エネルギー加速器研究機構）

○Xiuguang Jin, Yasunori Tanimoto, Takashi Uchiyama, Tohru Honda (High Energy Accelerator Research Organization)

Surface coatings on the vacuum chambers are used for various purposes. For example, in low emittance electron rings used in synchrotron light sources, the coatings with low photon-stimulated desorption (PSD) and low resistivity are required. The vacuum chambers are exposed the synchrotron radiation (SR), so reducing PSD shortens the commissioning time and contributes to safe operation. In addition, the low resistivity decreases the beam instability and heat generation. For these purposes, the dense Pd film was introduced. The 1.6 μm-thick Pd film was coated on the inner wall of Cu duct using magnetron sputtering, and the PSD analysis was carried out at BL21 of the Photon Factory. In comparison with low PSD materials of TiZrV coatings, the Pd coatings exhibited ultra-low PSD yields. Especially, the initial H2 PSD yield was lower over one order. These ultra-low PSD yields could be maintained after several cycles of air exposure and followed heating. In addition, the dense Pd films showed significantly lower resistivities compared to the TiZrV films. Our results support that the dense Pd coatings could potentially have applications in the low emittance electron rings.